What is a MEMS Optical Switch?

MEMS (Micro-Electro-Mechanical System) refers to a mass-produced micro-device or system that integrates micro-machines, micro-actuators, signal processing and control circuits. The preparation process of micro-mechanical structures includes photolithography, ion beam Etching, chemical etching, wafer bonding, etc., while electrodes are prepared on the mechanical structure for electronic control.

MEMS optical switches with complex movable 3D mechanical structures, micro-actuators, and micro-optical elements can be monolithically integrated on the same substrate by using well-established manufacturing processes in the integrated circuit industry.